Journal: Photonics

Article Title: Fabrication of 3D Photonic Crystals toward Arbitrary Manipulation of Photons in Three Dimensions

doi: 10.3390/photonics3020036

Figure Lengend Snippet: Figure 1. Schematic of the fabrication process of 3D photonic crystal.

Article Snippet: Photonics 2016, 3, 36 11 of 13 Finally, Figure 14 shows some example of 3D photonic crystals with functional components.

Techniques:

Journal: Photonics

Article Title: Fabrication of 3D Photonic Crystals toward Arbitrary Manipulation of Photons in Three Dimensions

doi: 10.3390/photonics3020036

Figure Lengend Snippet: Figure 13 illustrates the in-plane accuracy of the stacking position in the entire area. Here, the in-plane period was set to be 500 nm, and both the width and height of the rods were designed to be 180 nm. An optical-microscope image of the entire sample is shown in the center of Figure 13. The orange regions are the areas of photonic crystals. The regions surrounded by blue boxes are markers for alignment. The SEM images of each photonic-crystal area are shown around the optical-microscope image. These SEM images show that highly precise alignment was achieved in all the photonic-crystal regions on one chip. Although the formation of these four-layered structures requires the alignment and stacking procedure to be repeated thrice, all of the crystals were constructed with misalignments of less than ~50 nm. These results demonstrate that a rotational correction less than 15 µrad is obtained, which confirms the effectiveness of this automatic alignment system. We also confirmed that the 3D photonic crystal fabricated by stacking 16 layers showed a transmittance of approximately –65 dB in the vertical direction within a photonic bandgap range [13], which corresponds well with the calculation results showing a transmittance of –70 dB obtained by using a 3D finite-difference time-domain method. Such a 3D photonic crystal has also demonstrated an arbitrary 3D light guiding with the aid of artificially introduced defects [13]. Those results strongly suggest the efficacy of our highly-precise fabrication method, and will lead to the realization of low-loss photonic circuits including ultra-high Q nanocavities embedded in multi-layered structures with even more layers. We also expect that our technique is applicable to the batch fabrication of such high-quality 3D photonic crystals on even larger wafers, since the larger area will increase the distance between two alignment markers on either end of the wafers and thereby ensure rotational accuracy.

Article Snippet: Photonics 2016, 3, 36 11 of 13 Finally, Figure 14 shows some example of 3D photonic crystals with functional components.

Techniques: Microscopy, Construct

Journal: Photonics

Article Title: Fabrication of 3D Photonic Crystals toward Arbitrary Manipulation of Photons in Three Dimensions

doi: 10.3390/photonics3020036

Figure Lengend Snippet: Figure 14. Introduction of waveguides and nanocavities into 3D photonic crystals (a,b).

Article Snippet: Photonics 2016, 3, 36 11 of 13 Finally, Figure 14 shows some example of 3D photonic crystals with functional components.

Techniques: